HomeMy WebLinkAboutPC RES 1961 1
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RESOLUTION NO. 1961
A RESOLUTION OF THE PLANNING AGENCY OF
THE CITY OF TUSTIN AUTHORIZING THE
EXPANSION OF SILICON SYSTEMS INCORPORATED
TO INCLUDE SEMICONDUCTOR DEVICE FABRICATION,
LOCATION: 14351 MYFORD ROAD
The Planning Agency of the City of Tustin does hereby
resolve as follows:
I. The Planning Agency finds and determines as follows:
A. That a proper application (Use Permit No. 80-25)
has been filed on behalf of Silicon Systems In-
corporated (hereinafter "Applicant") to expand
their facility to include the fabrication of
semiconductor devices.
B. That a public hearing was duly called, noticed
and held on said application.
C. That establishment, maintenance, and operation
of the use applied for w~ll not, under the cir-
cumstances of this case, be detrimental-to the
health, safety, morals, comfort, or general
welfare of the persons residing or working in
the neighborhood of such proposed use, evidenced
by the following findings:
1. The development as proposed is in conform-
ance with the Tustin Area Plan.
2. The development as proposed is in conform-
ance with the standards of the Planned
Community/Industrial district.
D. That the establishment, maintenance, and opera-
tion of the use applied for will not be injurious
or detrimental to the property and improvements
in the neighborhood of the subject property, nor
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II.
to the general welfare of the City of Tustin,
and should be granted.
E. Proposed development shall be in accordance with
the development policies adopted by the City
Council, Uniform Building Codes as administered
by Orange County Fire Marshal, and street improve-
ment requirements as administered by the City
Engineer.
F. That a Focus Environmental Impact Report was
prepared as an amendment to the master EIR, and
was certified by the City Council on April 6,
1981.
G. Final development plans shall require the review
and approval of the Community Development Depart-
ment.
The Planning Agency hereby approves Conditional Use
Permit No. 80-25 to authorize the expansion of Silicon
Systems Incorporated, located at 14351 Myford Road
to include the fabrication of semiconductor devices
subject to the following conditions:
A. The final site plan shall be standardized and
reflect all appropriate City standard drawing
numbers. The developer shall construct all
missing or damaged street improvements to said
development per the City of Tustin "Minimum
Design Standards of Public Works" and "Street
Improvement Standards". This work shall consist
of, but is not limited to: curbs and gutters,
sidewalks, drive apron, and street pavement.
B. Applicant shall install, implement and maintain
all of the mitigating measures into the development
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plans and ongoing manufacturing of semi-conductor
devices at the subject property outlined in
Focus EIR-81-1, including, but not limited to,
the following:
1. Applicant shall install and maintain two
stage pressure regulators to control the
gas pressures in all gas lines.
2. Wherever possible, gas lines shall be heliarc
welded to minimize the ~number of mechanical
fittings.
3. Gas panels shall be vented to scrubbers.
4. Gas cylinders shall be stored and used outside
of the building.
5. Each gas cylinder regulator assembly shall be
plumbed to a cylinder nitrogen source so that
in case of a line leak or bottle change, the
nitrogen shall purge out the specialty gas
from the gas lines.
6. Wherever possible, phosphine shall be premixed
with silane.
7. All lines will be checked for leaks statically
and fitting by fitting after initial construc-
tion.
8. Whenever an accident occurs involving arsine
or arsenic trioxide, the procedure specified
in Environmental Impact Report 81-1 commencing
on page 43 shall be followed.
9. In the storage, usage and disposal of hydro-
gen gas the following design features shall
be used to minimize potential hazards:
a. The liquid hydrogen tank shall be at least
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180 feet from the building.
Liquid hydrogen tank and evaporator
shall be enclosed by a fence and wall.
The line between the liquid hydrogen
tank and the building shall be installed
underground.
The main line shall have an automatic
shut-off valve activated by an earthquake
of significant magnitude with a manual
reset.
The main line shall have an automatic
shut-off valve activated by an unusually
high flow rate to protect against acciden-
tal line rupture or maintenance error.
The main line shall have a normally
closed valve kept open electronically.
This valve s~all shut off the hydrogen
supply in case of:
i. Loss of power.
ii. Detection of hydrogen in the fab
process areas.
iii. Detection of fire in the process
exhaust ducting.
iv. Activation of "emergency off" but-
tons by the personnel.
In all of the above cases a manual reset
shall be necessary to turn the hydrogen
back on.
Hydrogen detectors shall be located in
areas most likely to accumulate hydrogen
in case of a leak.
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h. Ultraviolet detectors shall be installed
in the hydrogen process exhaust ducting
to detect fire and activate local reactor
in main line shutdowns described above.
i. Alarm indicator lights shall be located
locally at the hydrogen use areas, central
Status/Alarm panels in the fab area, the
maintenance area, and the security station
j. A documented maintenance schedule shall
be established with calibration and check-
ing procedures, logs to indicate results
found, when, and by whom the maintenance
was performed.
10. ~The following design features shall be utilized
to reduce potential hazards pertaining to the
use of acids, bases and solvents:
a. All chemical storage areas shall be
clearly marked acid, base, or solvent
storage.
b. The general acid storage area shall have
a recessed floor to contain any liquid
in case of bottle breakage or spill, and
a drain in the general acid waste neutral-
ization tank. Acids shall be stored in
areas separated from the solvents to pre-
vent reaction resulting from simultaneous
spills. Interim storage of small amounts
of acid shall occur in vented cabinets.
c. Transfer carts and individual carriers
shall be closed bottomed vessels of
adequate volume to totally contain the
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liquid in case of a bottle breakage.
d. Wherever possible, filtered acid recir-
culation modules shall be utilized.
e. Acid shall not be disposed of in solvent
drain lines or underground solvent storage
tanks.
f. Air flow shall be established around the
edge of the acid vessel "lips" to insure
good quality air at the work stations.
g. In the case of an accident involving acids
the procedures specified in Environmental
Impact Report 81-1 commencing on page 53
shall be followed.
11. The design features to be utilized with respect
to the use of bases shall be essentially the
same as those required in the use of acids.
12. The following design features and procedures
shall be utilized with respect to the use of
organic solvents:
a. Organic solvents shall be physically
isolated from acids.
b. Storage areas shall be vented and air
circulation provided.
c. Storage areas and cabinets shall be color
coded and clearly labeled.
d. Bulk storage and solvent system block-
houses shall be sprinklered.
e. Explosion-proof lights, pumps, switches
and other electrical fixtures shall be
used in the solvent dispensing system.
f. On-line 55-gallon drums shall be vented
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via flame arresters.
On-line 55-gallon drums shall be
grounded.
Non-spark tools shall be used for tank
changing and for normal duties in the
solvent dispense blockhouse.
High and low level indicators shall
indicate any abnormal problems at the
dispense reservoirs.
Solvent lines shall be color-coded and
labeled.
Fire Marshal approved smoke and fire
alarms shall be located in the solvent
storage and dispense blockhouses. Status
and alarm indication shall show on the
Status/Alarm panels at the security
station, in the fabrication area and in
maintenance.
High-velocity air exhaust flows shall
be used to maintain air quality for per-
sonnel. Duct configurations shall
be custom adapted to or part of the
equipment to insure efficient removal
of organic vapors.
In case of a total power failure the
system shall be designed to maintain
a 75% air flow rate via an emergency
generator.
Solvents shall not be mixed with acids
in the sinks.
Work stations shall be sprinklered.
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p. In case of an accident involving organic
solvents, the procedures specified
in Environmental Impact Report 81-1
commmencing at page 61 shall be followed.
13. Mitigation of ambient air contaminents
from the project shall be provided in the
form of at least two scrubbers for manufactur-
ing process vapors. All vapors from the
manufacturing process shall be vented and
exhausted through these scrubbers. The
scrubbers shall have a guaranteed efficiency
of 95% in HCL removal at 100 ppm concentration.
They shall be designed for 23,000 cfm air/vapor
flow each and shall be operated in parallel at
15,000 cfm each (total flow 30,000 cfm). In
the case of failure of one scrubber, the
process lines sha~l be cut back in their
operation to insure that both adequate venti-
lation and scrubbing of the exhaust vapors are
being accomplished. To provide improved
dispersion of vapors exhausted to the atmos-
phere, a velocity nozzle shall be designed
into the exit of each scrubber stack to
increase exit velocity from 2,000 feet per
minute to 3,000 feet per minute.
14. Silicon Systems Incorporated shall apply for
and maintain a class I wastewater discharge
permit [16] with the Orange County Sanitation
District. To minimize the possible discharge
of hazardous waste to the sewer system, a
random sampling of the general acid waste line
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shall be Conducted monthly to insure that
hazardous liquid materials are not being
disposed of via the line and hence to the
sewer system. Records of all samplings and
analysis results shall be kept in a permanent
log form and made available to the City of
Tustin and its staff and consultants for
review.
15. Silicon Systems Incorporated shall apply
the mitigation measures proposed in Environ-
mental Impact Report 81-1 commencing from
page 92 pertaining to aesthetics.
16. Silicon Systems Incorporated shall develop
the project in conformance with the planned
community district (PCD) regulations estab-
lished by the City of Tustin for parking
within and around the project. Specifically,
Silicon Systems Incorporated shall comply
with the regulations specified in the Environ-
mental Impact Report 81-1 commencing from
page 94.
17. In the event that any complaint is filed with
the City of Tustin against Silicon Systems
Incorporated related to hazardous conditions,
offensive or nauseous odors, nuisance, or any
possible violations of the conditions imposed
herein, and upon investigation and reasonable
determination by the City that Silicon
Systems Incorporated is a probable cause
of the alleged offenses, the City may order
Silicon Systems Incorporated to terminate
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the operations which are reasonably determined
to be a probable cause and Silicon Systems
Incorporated agrees to terminate such
activities without the necessity of a
court order or public hearing and until
such time as Silicon Systems Incorporated
can provide the City of Tustin evidence from
an independent authority that the cause
of the offense has been corrected or
that Silicon Systems Incorporated has not
been the source of the hazard, nauseous or
offensive odor, or nuisance.
18. Upon notice from the City of a drought or
water shortage affecting the ability of the
City to assure domestic water supply to
its then existing water customers, Silicon
Systems Incorporated agrees to restrict and
shall restrict its water purchase from the
City to a maximum of 4,000,000 gallons
per thirty-day period. Silicon Systems
Incorporated shall further restrict
water purchases from the City if more
severe restrictions are universally applied
to all other industrial water users in the
City of Tustin. When the drought or water
shortage emergency has expired as determined by
the City and distribution throughout
the City system has returned to normal,
water usage by Silicon Systems Incorporated
will no longer be restricted.
19. Silicon Systems Incorporated agrees to and
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shall hold the City harmless from any damages
resulting to Silicon Systems Incorporated
as a result of the City's enforcement of
this permit and any conditions thereof,
including, but not limited to, damages
caused by an order or actions of the City
terminating any of Silicon System Incor-
porated's activities as provided herein.
20. With respect to paragraphs 17 and 1~ above,
the City shall prepare written reports of its
investigations and findings and make said
reports available to Silicon Systems Incor-
porated within 48 hours after ordering the
termination of Silicon Systems Incorporated's
operations or taking action by City to ter-
minate.
Any vehicles transporting hazardous or explosive
substances to Silicon Systems Incorporated's com-
plex shall not use for ingress or egress any adja-
cent roadways that serve Tustin residential areas.
Prior to occupancy and operation of the new
facilities, all sewer improvements required by
the City Engineer and reasonably related to this
project shall be completed.
Final development plans shall be approved by the
Irvine Company.
The use permit granted by this Resolution No. 1961
shall be of no force and effect unless and until
all of the conditions outlined herein are satisfied
by Silicon Systems Incorporated, and further, unless
Silicon Systems Incorporated. agrees by execution of
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a copy of this Resolution No. 1961 to be bound by
the terms and conditions of Use Permit 80-25.
G. The terms and conditions of this Resolution No.
1961 and Use Permit 80-25 shall be applicable to
Silicon Systems Incorporated, and any and all
successors and assigns of Silicon Systems Incor-
porated. Silicon Systems Incorporated shall provide
all prospective owners/operators with a copy of
this Resolution No. 1961 prior to transferring
them any interest in Silicon Systems Incorporated
or allowing them to operate the facilities
which are the subject of this Resolution.
PASSED AND ADOPTED at a regular meeting of the Tustin Planning
Agency held on the 20th day of April, 1981
ATTEST:
R~cor~ng SecreGary
April , 1981.
James B. Sharp, ~alrman
In consideration of the approval of this Resolution No. 1961
by the Planning Agency of the City of Tustin, Silicon Systems
Incorporated agrees to comply with and be~ound by all of the
terms and conditions imposed herein. CH /t / ~.~_~~~~TH/~E BOA
~cretary v.
RLL: lw: D: 4/13/81
RLL:lw:R: 4/16/81
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STATE OF CALIPORNIA )
OOUNTY OF ORANGE )
CITY OF ~JSTIN )
I, Nt~f ANN CHAMBERLAIN, the undersigned, hereby certify that I am the
Recording Secretary of the Planning Agency of the City of Tustin, California;
that the foregoing Resolution was duly passed, and adopted At a regular mcct~/
of the Tustin Planning Agency, held on the ~ day of ~~'~ _, 19~
/ / -
Associate Planner
Tustin Planning Agency